溶胶–凝胶法制备掺铝氧化锌薄膜及其近红外反射性能研究

Preparation of Al-doped zinc oxide (ZAO) thin film by sol-gel process and its near-infrared reflective properties

采用溶胶–凝胶法制备了掺铝氧化锌(ZAO)薄膜,用X射线衍射(XRD)、紫外–可见光–近红外分光光度计等分析测试手段对薄膜进行了表征;通过正交试验探讨了镀膜层数、溶胶浓度、铝离子的摩尔分数以及退火温度等因素对掺铝氧化锌(ZAO)薄膜近红外反射率的影响,优选了制备具有高近红外反射率的薄膜的工艺参数。研究结果表明,当溶胶浓度为0.9mol/L,Al3+的摩尔分数为0.8%,退火温度为500°C,镀膜层数为15层时,所得薄膜样品的近红外平均反射率达到35.73%,最高反射率达到46.99%,在2000nm附近的最高近红外反射率达到40.38%。

An Al-doped zinc oxide （ZAO） thin film was prepared by sol-gel method, and then characterized by X-ray diffraction （XRD） and UV-Vis-NIR spectrophotometer. The effect of coating layers number, sol concentration, Al^3＋ molar fraction and annealing temperature on the near-infrared reflectance of the ZAO thin film were studied by orthogonal test and the process parameters for preparing thin films with high near-infrared reflectivity were optimized. The results demonstrated that the average near-infrared reflectance of ZAO thin film reaches 35.73%, with the maximal reflectance of 46.99% and the maximal reflectance of 40.38% near the wavelength of 2 000 nm, when the sol concentration is 0.9 mol/L, Al^3＋ molar fraction 0.8%, annealing temperature 500 ℃ and coating layers number 15.