薄膜沉积过程中TiO_2的金红石相向锐钛矿相转变

The Phase Change of Deposited TiO 2 Films from Rutile to Anatase

用ＲＦ磁控放电方法以纯金属钛做靶材在氩氧混合气体中制备了ＴｉＯ２薄膜，Ｒａｍａｎ光谱测量表明，在２Ｐａ工作气压下制备的ＴｉＯ２薄膜为锐钛矿结构，而在０２Ｐａ工作气压下制备的是金红石结构。工作气压的改变引起了ＴｉＯ２薄膜沉积中的相转变。

TiO 2 films are deposited by means of RF magnetron sputtering using pure Ti(99 99%) as the target and Ar mixed with N 2 as reactive gas, and the Raman spectra of the films indicates that the films structure changes from Rutile to Anatase while the working press from 0 2Pa to 2Pa.