光学薄膜的小光斑扫描激光预处理研究

Study of Laser Conditioning of Optical Coatingsw ith Sm all Laser Spot Scanning

激光预处理是一种提高光学薄膜破坏阈值的新技术， 采用小光斑扫描并逐步提高预处理能量的方法， 对不同类型的薄膜进行激光预处理， 实验结果发现， 除了 Ｈｆ Ｏ２／ Ｍｇ Ｆ２ 多层反射膜外， 其它样品的 ０ 几率破坏阈值 Ｆ０、发生破坏的最低能量密度值 Ｆ Ｄｍ ｉｎ、不发生破坏的最高能量密度值 Ｆ Ｎ Ｄｍ ａｘ 以及５０几率损伤阈值 Ｆ５０ 都有不同程度的提高。这说明， 激光预处理不仅可以清除薄膜中的杂质和缺陷，

Laser conditioning is a new technology to enhance laser dam age threshold of theoptical coatings. The m ethod of the sm all laser spot scanning and raising of energy step bystep is applied to condiation severalvarious m ulti layer reflective coatings. It is found experi m entally that the dam age thresholds of the reflection coatings, except of Hf O2 / Mg F2 m ulti layer coating, such as zero probability dam age threshold F0 , m inim um dam age energy den sity F Dm in , m axim um not dam age energy density F N Dm ax and 50% probability dam age threshold F50 are allenhanced. It m eans that laser conditioning technology not only can elim inate theim purities and defects in the coating, but also can im prove the w hole properties of the coat ing.