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含Ni-Al阻挡层硅基BiFe_(0.95)Mn_(0.05)O_3铁电电容器的结构及物理性能 被引量:3

Structure and Physical Properties of Si-based BiFe_(0.95)Mn_(0.05)O_3 Ferroelectric Capacitor Using Ni-Al as the Barrier Layer
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摘要 以Ni-Al为阻挡层,在Si衬底上构架了SrRuO3(SRO)/BiFe0.95Mn0.05O3(BFMO)/SRO异质结电容器。X射线衍射(XRD)分析表明:Ni-Al阻挡层为非晶结构,BFMO薄膜为具有良好结晶质量的多晶结构。在5 kHz测试频率下,SRO/BFMO/SRO电容器呈现饱和的电滞回线。实验发现,SRO/BFMO/SRO铁电电容器具有良好的抗疲劳性能。漏电机制研究表明,外加电场小于210 kV/cm时,SRO/BFMO/SRO电容器满足欧姆导电机制,在电场大于210kV/cm时,满足空间电荷限流传导机制。 SrRuO3(SRO)/BiFe0.95Mn0.05O3(BFMO)/SRO heterostructure capacitors were fabricated on Si substrates using Ni-Al as the barrier layer between Si and SRO.X-ray diffraction(XRD) reveals that the Ni-Al barrier is amorphous,while well-crytallinized BFMO film is polycrystalline.A good saturated hysteresis loop coude be obtained from the SRO/BFMO/SRO ferroelectric capacitor at 5 kHz.The experiment results show that BFMO capacitor possesses very good fatigue-resistance.The leakage mechanism of the SRO/BFMO/SRO ferroelectric capacitor was studied.SRO/BFMO/SRO capacitor satisfied the ohmic conduction behavior at applied fields lower than 210 kV/cm and bulk-limited space-charge-limited conduction(SCLC) at the applied fields higher than 210 kV/cm.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2011年第1期33-37,共5页 Journal of Synthetic Crystals
基金 国家自然科学基金(60876055 11074063)资助项目 河北省自然科学基金(E2008000620)资助项目 河北省应用基础研究计划重点基础研究项目(10963525D) 高等学校博士点基金(20091301110002)
关键词 BiFe0.95Mn0.05O3 NI-AL 阻挡层 漏电机制 BiFe0.95Mn0.05O3 Ni-Al barrier layer leakage mechanism
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参考文献18

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共引文献21

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