钛酸锶钡/铋锌铌多层复合薄膜的制备及性能

Preparation and dielectric properties of Ba_(0.5)Sr_(0.5)TiO_3/Bi_(1.5)Zn_(1.0)Nb_(1.5)O_7 multilayer composite films

采用溶胶–凝胶法在Pt/Ti/SiO2/Si衬底上制备了钛酸锶钡/铋锌铌多层复合薄膜样品。研究了不同退火温度下多层复合薄膜的结构、微观形貌及介电性能。结果表明:在退火温度高于700℃时,所得复合薄膜中会出现立方焦绿石结构的铋锌铌和钙钛矿结构的钛酸锶钡。750℃退火处理得到的多层复合薄膜,表面致密、无裂纹,其相对介电常数为146,介电损耗为0.004;在频率为10 kHz,电场强度为6×105 V/cm时,其介电可调率达到13%,品质因子(FOM)达到32.5。

Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7（BST/BZN） multilayer composite films were prepared on Pt/Ti/SiO2/Si substrates by the sol-gel method.The structures,microscopic morphologies and dielectric properties of BST/BZN multilayer composite films annealed at different temperatures were studied.The results show that perovskite BST phase and cubic pyrochlore BZN phase can be found in the prepared multilayer composite films annealed at above 700 ℃.The BST/BZN multilayer composite film annealed at 750 ℃ shows a compact and crack-free surface,while its dielectric permittivity and dielectric loss are 146 and 0.004,respectively.In addition,at 10 kHz and 6×105 V/cm,its dielectric tunability and figure of merit（FOM,defined as the ratio of dielectric tunability and dielectric loss at room temperature） reach 13% and 32.5,respectively.