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具有独立探头的3ω技术测量固体热导率 被引量：1

Freestanding Sensor-Based 3ω Technique for Thermal Conductivity Measurement of Solids
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摘要 设计并制作了一种适用于3ω技术的独立探头。提出了利用基于这种独立探头的3ω技术进行固体热导率测量的原理和方法。与传统3ω技术相比,基于独立探头的3ω技术具有探测器使用寿命长、不再对样品表面有光滑要求的优势,并且实现了对样品热导率的无损测量。对几种标准样品的热导率进行测试的结果表明,基于独立探头的3ω技术在表征块状固体及几百微米厚晶片的热导率方面有很高的准确性,且在传统3ω技术不适用的材料(如具有多孔结构的样品)的热导率表征方面具有潜在的应用价值。 A freestanding sensor based on 3ωtechnique was designed and fabricated.The principle and measurement method for thermal conductivity characterization of solids using this freestanding sensor-based 3ωtechnique was proposed.Compared with the conventional 3ωtechnique,the service life of the sensor is improved and the smooth surface of the specimen is no longer needed.Furthermore, the nondestructive thermal conductivity characterization for specimens based on the 3ωtechnique is first realized.Experimental results indicated the freestanding sensor-based 3ωtechnique owns good accuracy for the thermal conductivity measurement for solid bulks and hundreds of microns thick wafers.This new technique has potential application value in the thermal conductivity measurement where the conventional 3ωtechnique is not applicable as samples with porous structures.
作者 邱琳 郑兴华 苏国萍 唐大伟
机构地区 中国科学院工程热物理研究所 中国科学院研究生院
出处 《工程热物理学报》 EI CAS CSCD 北大核心 2011年第4期621-624,共4页 Journal of Engineering Thermophysics
基金 国家自然科学基金资助项目(No.50876103)
关键词 独立探头 3ω技术 热导率 固体 freestanding sensor 3ωtechnique thermal conductivity solid
分类号 TB942 [机械工程—测试计量技术及仪器]
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参考文献17

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同被引文献31

  • 1沈军,汪国庆,王珏,邓忠生.SiO_2气凝胶的常压制备及其热传输特性[J].同济大学学报（自然科学版）,2004,32(8):1106-1110. 被引量：26
  • 2Tascius T B,Kumar A R,Chen G.Data Reduction in 3ωMethod for Thin-Film Thermal Conductivity Determination [J].Rev Sci Instrum,2001,72(4):2139-2147
  • 3YI W,LU L,ZHANG D L,et al.Linear Specific Heat of Carbon Nanotubes[J].Phys Rev B,1999,59(14):9015- 9018
  • 4WANG Z L,TANG D W,LI X B,et al.Length-Dependent Thermal Conductivity of an Individual Single-Wall Carbon Nanotube[J].Appl Phys Letts,2007,91: 123119
  • 5LU L,YI W,ZHANG D L.3ωMethod for Specific Heat and Thermal Conductivity Measurements[J].Rev Sci Instrum, 2001,72(7):2996-3003
  • 6Hu X J,Padilla A A,Xu J,et al.3-Omega Measurements of Vertically Oriented Carbon Nanotubes on Silicon[J].J Heat Transfer,2006,128:1109-1113
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  • 9郑兴华,唐大伟,邱琳,等.3ω法测量SiO_2粉体热导率和热扩散率[C]//中国工程热物理学会学术会议上海,2010
  • 10X Lu,R Caps,J Fricke,et al.Correlation Between Structure and Thermal Conductivity Of Organic Aerogels[J]. J Non-Crystal Solids,1995,188:226-234

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工程热物理学报
2011年 第4期

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