摘要
该文总结了双波长激光干涉仪研制过程中减小量块中心长度测量不确定度的几项重要措施,该干涉仪对量块中心长度的测量不确定度达到(0.02±0.2L)μm,并已成功应用于高等级量块的自动测量。
This paper summarizes several important measures for reducing the uncertainty of measurement in the process of developing the laser interferometer for gauge block measurement with double wavelengths.The interferometer achieves the measurement uncertainty of （0.02＋0.2L）μm for measurement of central lengths of gauge blocks and has be successfully used to the automatic measurement of the high-grad gauge blocks.
出处
《上海计量测试》
2010年第6期27-29,共3页
Shanghai Measurement and Testing
关键词
量块
激光干涉仪
测量不确定度
gauge blocks
laser interferometer
uncertainty of measurement
