摘要
以薄膜原理为基础,通过Essential Macleod软件进行膜系设计.采用电子束加热蒸发的镀膜方式,利用设计工装制备了介质ZrO2-SiO2高反射膜层和金属铝反射膜层.介质高反膜层在1.064μm波长处的反射率达到95%,金属铝反射膜层的在3μm～5μm波段内的平均反射率超过95%.膜层的技术指标和环境适应性能具有优质的质量.
Coatings were designed by Essential Macleod software based on the theory of film.High reflective ZrO2-SiO2 dielectric coating and reflective aluminum coating were made using the design clothes by electron beam heating evaporation coating method.The reflectivity of dielectric coating is up to rate of 95% in wavelength of 1.064 μm,and the average reflectivity of aluminum coating is over 95% between 3 μm and 5 μm.The technical parameters and environmental adaptability of the film are excellent.
出处
《光电技术应用》
2010年第6期22-24,共3页
Electro-Optic Technology Application
关键词
平面反射镜
光学薄膜
反射率
plane reffection mirror
optical film
reflectivity
