摘要
阐述了液相法中制备超薄功能膜的新方法——连续离子层吸附反应法(Successive Ionic Layer Adsorption and Reaction,SILAR)。探究了它的薄膜生长机理、工艺参数影响以及应用现状,指出了尚需深入研究的问题。
A new technique called SILAR（Successive Ionic Layer Adsorption and Reaction） for the preparation of ultra-thin functional film and its development are introduced.The mechanism of the film nucleation and growth,the technics parameters effect,and the application situation are discussed and the main subjects to be deeply studied are poined out as well.
出处
《宇航材料工艺》
CAS
CSCD
北大核心
2010年第4期5-9,共5页
Aerospace Materials & Technology
