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仿生水听器设计、制造与测试 被引量:1

Design and Fabrication of a Bionic Hydrophone and Its Test
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摘要 根据仿生鱼类侧线细胞纤毛原理,设计、制造并测试了一种新型双纤毛压阻水听器,用于检测水下声信号。与传统的压电水听器相比,这种水听器具有体积小和矢量性的优点。利用聚氨酯仿生细胞壁作为透声帽,利用硅油模拟细胞液和压阻微梁模拟感觉纤毛三层拾振结构,从而提高纤毛式水听器的可靠性。封装以后的纤毛式水听器采用振动台和矢量水听器校准系统进行测试,测得谐振频率为2.03 kHz,灵敏度可达-180 dB,具有余弦"8"字指向性。 A silicon machined double-cilia micro-hydrophone is developed for underwater acoustic measurement.These hydrophones have the advantages of miniaturization and directional compared to the conventional piezoelectric acoustic hydrophones.The package of hydrophone imitates the lateral line cell of fish to improve the reliability of the hydrophone,using polyurethane as the cupula for packaging cap and silicone oil as the mucus and the beam as the cilium.The packaged hydrophone is tested by sensor auto calibration vibration system and vector hydrophone calibration system.The sensitivity is measured to be-180 dB and the corresponding resonant frequencies are 2.03 kHz,the hydrophone has a cosine "eight" directivity patterns.
出处 《海洋技术》 北大核心 2011年第1期44-47,共4页 Ocean Technology
基金 国际科技合作重大项目(2010DFB10480) 国家自然科学基金(50535030)
关键词 MEMS 矢量水听器 纤毛 测试 MEMS vector hydrophone cilium test
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  • 1乔慧,刘俊,张斌珍,张文栋,熊继军,薛晨阳.一种新型压阻式硅微仿生矢量水听器的设计[J].传感技术学报,2008,21(2):301-304. 被引量:24
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