化学法多晶硅生产工艺研究进展

The Research Progress of Polysilicon Production by Chemical Routes

随着能源危机的不断加剧,太阳能作为可再生能源已成为关注的焦点。从国内外多晶硅的生产状况,综述了化学法多晶硅的生产工艺,重点分析比较了几种潜在工业应用的流化床法生产多晶硅工艺的特点,指出未来多晶硅生产应当以流化床法为主,并耦合其它相关技术。同时展望了未来化学法生产多晶硅的发展趋势。

With the deepening energy crisis,new energy was increasingly important.As a renewable energy form,polysilicon and its applications were focused on.A condensed overview of the potential offered was presented by chemical routes,such as fluidized bed process,process of improved Siemens,and process of silane method,for production polysilicon with current advances.Specially,recent research and development of fluidized bed reactor for preparing polysilicon were comprehensively covered.The potential industrial processes based on fluidized bed reactor methods were discussed in the terms of their advantages over classical.Simultaneity,a vista of the future investigations was opened up new realms by pathways of fluidized bed to prepare polysilicon for the industrial processes.