CVD金刚石薄膜涂层整体式刀具的制备与应用

Fabrication and application of CVD diamond coated cutting tools

化学气相沉积(chemical vapor deposition,CVD)金刚石薄膜具有硬度高、摩擦系数低、耐磨性强以及表面化学性能稳定等优异的机械及摩擦学性能,这使其在硬质合金工模具领域具有广阔的应用前景。本文采用热丝化学气相沉积法(hot filament chemical vapor deposition,HFCVD),在具有复杂形状的硬质合金整体式铣刀表面沉积了一层均匀、光滑的金刚石薄膜,并采用石墨以及碳化硅铝基增强复合材料作为工件材料对比考察了金刚石薄膜涂层铣刀和未涂层硬质合金铣刀的切削性能。铣削实验结果显示,在硬质合金整体式铣刀表面沉积一层CVD金刚石薄膜能够大幅提高铣刀的耐磨性,从而提高硬质铣刀的寿命。

Chemical vapor deposition （CVD） diamond film is regarded as an excellent coating material that can be applied in a variety of industry fields owing to its wonderful mechanical and tirbological properties, such as high hardness, low fi-iction, good wear resistance and stable chemical inertness. In this study, a layer of smooth and homogeneous diamond film is deposited on the surface of WC-Co milling tool with complex shape, using hot filament chemical vapor deposition （HFCVD） method. The cutting performance of as-fabricated CVD diamond cutting tools is examined in machining graphite and A1/SiC-MMCs, in comparision with uncoated WC-Co cutting tools. The results of machining experiments show that depositing a layer of CVD diamond coating on the surface of WC-Co milling tools is significantly beneficial to the increase of the wear resistance of milling tools, and thus elongating their lifetime.