利用低角度反向散射电子检测器对纳米尺寸材料进行表征

Characterizing Nanometer-Scale Materials Using a Low-Angle Backscattered Electron Detector

在制作新材料之前了解其性质是一项具有挑战性的任务。一般来说,一个尺寸非常小的材料的结构对其性质和功能具有决定性作用。随着表征技术的不断进步,科学家所研究的固体材料越来越接近单个原子的尺寸。扫描电子显微镜法最特殊的功能之一就是可以研究相对较大的样品,比如说那些能够放在手上并且能够达到纳米尺寸分辨率的样品。最新一代的场致发射扫描电子显微镜能够应对表征纳米尺寸材料的挑战。

Understanding the properties of new materials prior to fabrication can be challenging. Often, the structure of a material at very small scales is critical to its properties and performance. Visualization technologies continue to improve, allowing scientists to investigate solid materials at scales closer and closer to the scale of individual atoms. One of the most exceptional aspects of scanning electron microscopy is the ability to investigate relatively large samples, such as those that can be held in the hand, with nanometer-scale resolution. The latest-generation field emission scanning electron microscopes （FESEMs） are up to the challenge of characterizing nano-meter-scale materials.