利用光学系统色偏移进行表面粗糙度检测的方法及结构分析

The method for measuring surface roughness by chromatic focal shift of optical system and its structure analysis

利用光学方法对表面粗糙度进行检测以其非接触、高精度、无损伤、测量速度快等特点得到了广泛应用。文中介绍了一种利用多色光的轴向色焦点偏移进行表面粗糙度测量的方法,该方法基于共聚焦显微系统的基本思想。文章阐述了该方法的基本原理,并设计了一组光学系统对方法进行分析验证。

Measurement of surface roughness with optical methods is widely used now due to its contactless, high precision, non-damage, high measuring speed, etc. This paper introduces a new non-contact method based on the confocal optical system to measure the surface roughness, which uses the principle of chromatic focal shift to measure surface roughness. This paper describes the principle of this new method and designs an optical system to analyze and confirm the feasibility of this method.