冶金法制备太阳能级多晶硅的热力学研究进展

Development of thermodynamic characteristic study of refining solar grade silicon by metallurgical method

冶金法制备太阳能级硅是目前多晶硅材料的研究热点。为更深入理解冶金法制备太阳能级硅的原理,本文综述了几种常见的冶金法提纯多晶硅的热力学研究进展,重点对定向凝固过程中杂质的分凝系数问题、真空精炼中杂质蒸气压与温度的关系、以及合金造渣和氧化造渣中杂质的分配规律,以及渣相和硅相体系中各组元的活度测定方法进行了分析,提出了多晶硅热力学研究中尚存在的问题。

Abstract： Refining of solar grade silicon by metallurgical method is a research hotspot in the polyerystalline field. To understand the principles of the metallurgical methods refining solar grade silicon and provide the theory guidance for the refining process, the paper summarized the development of the thermodynamic studies of metallurgical methods, such as the segregate coefficient of impurities in silicon in directional solidification method, the saturated pressure of the impurities and silicon at different temperature in vacuum refining method, as well as distribution of impurities in alloy slagging and oxide slagging method. Moreover, some thermodynamic properties such as activity of the slag and the impurities in silicon were analyzed and proposed the direction of thermodynamic study in reefing solar grade silicon by metallurgical methods.