摘要
微传感器结构刚度是优化传感器结构尺寸、研究传感器动力学特性的一个重要参数。目前多采用有限元分析获取这一参数,但该方法难于给出一个物理思想比较明确的解析表达式。文中依托自主设计的一种具有复杂微结构的二维加速度传感器,综合运用力法和功能原理推导微结构偏轴刚度的解析式,为实现考虑交叉干扰因素的微结构几何参数优化奠定基础。推导中全面考虑各变形梁的影响,所以理论计算值与仿真值吻合。推广应用算例表明,该方法具有普遍意义,可应用于具有对称、超静定特征的复杂微结构的位移计算和刚度分析。
The stiffness of microstructures is an important parameter of microsensor.This parameter is usually obtained by finite element method（FEM）,which is difficult to give an analytical expression and is not easy to quantificationally analyse the influence of structural parameters on stiffness.A 2D microaccelerometer with complex microstructure is presented.Its cross-axial stiffness is carried out by using force method as well as principle of work and strain energy,which provides the basis for optimization design considering the cross coupling factor.During the deduction,deformation of all beams is taken into account,so the theoretical results are in accordance with that of FEM.Furthermore,neither the other assumptions nor the special dimensions are involved.So this methodology is strict in theory,and can be extended to analysis for the displacement and stiffness of the symmetrical and statically indeterminate microstructure.
出处
《机械强度》
CAS
CSCD
北大核心
2011年第2期183-188,共6页
Journal of Mechanical Strength
关键词
微机电系统
加速度传感器
微结构
刚度
力法
功能原理
Micro-electro-mechanical system（MEMS）
Accelerometers
Microstructure
Stiffness
Force method
Principle of work and strain energy
