真空/可控气氛共晶炉石英加热管密封的设计与改进

Design and development of the seal for quartz heating tube in the vacuum & inert atmosphere eutectic oven

介绍了真空/可控气氛共晶炉设备,叙述了炉体石英加热管密封的设计选型以及后来的改造过程,最后总结了真空密封的特点和基本要求。

Describes the vacuum inert atmosphere eutectic oven and the design and development of the seal for quartz heating tube in the furnace.At last,summarizes the characteristics and basic requirements of vacuum seal.