一种新的光学角度测量与补偿

A New Optical Angle Measurement and Compensation

石英晶体在切片过程中由于加工误差会引起两表面的不平行,从而影响对其晶向的判断.为了弥补这种缺陷,需要对上下两表面的倾角进行测量.本文对全自动X射线分选仪的晶体倾角测量问题进行了研究,用位置灵敏探测器探测被晶体反射的激光光斑,推导出了位置灵敏探测器探测到的坐标点随上下晶面夹角的关系式,并进一步分析了不同入射角,不同晶体厚度情况下位置灵敏探测器上的光斑形状.最后得出位置灵敏探测器纵坐标轴上的高度差和上下晶面夹角的近似线性的关系,发现当入射角为20°时误差最小,为5.306 2×10-6mm,选用这一入射角时的系统分辨率和测量范围分别为1.033″和15′.

In the process of cutting quartz,machining errors often cause two surfaces unparallel,which will can influence on the judgment to its crystal orientation.The angle measurement of full-automated x-ray sorting machine was analyzed.The light spots deflected by quartz were detected by position sensitive detector,and relational expression between points position sensitive detector detected in the coordination and angles between top and bottom surfaces was deduced.And,the shapes of the light spots on the position sensitive detector in different incident angles and thicknesses were studied.It was found that similar linear relationship exists between height differences at coordination axis on position sensitive detector.When the incident angle is 20°,the norm of residual has the smallest value of 5.306 2×10-6 mm.The system resolution and measurement range are 1.033″ and 15′ respectively.