离子束,电子束光刻等离子体源
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6刘锦景,刘道亚,董建峰,张斌,何如双,陶卫东,陈宝钦.平面手征结构的旋光度精密测量[J].光电子．激光,2014,25(9):1732-1735. 被引量：1
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