摘要
扼要综述了我国等离子体材料工艺研究的新近进展．内容包括：热等离子体源，等离子冶金、化工、超细粉合成、喷涂；低气压非平衡等离子体源，镀膜，表面改性，等离子浸没离子注入；电晕放电，介质阻挡放电，滑动弧等及其应用．当前。
A summary is presented of recent research on plasma processing in China,including thermal plasma sources,plasma metallurgy and chemical engineering,synthesis of ultra fine powders,spraying,cold plasma sources,deposition,surface modification,ion plating, plasma immersed ion implantation,corona discharge,dielectric barrier discharge,the gliding arc and related appliations.It appears that the deposition of thin films and surface modification are the most active areas at present.
出处
《物理》
CAS
1999年第7期388-393,共6页
Physics
基金
国家自然科学基金
中国科学院重大基础研究项目
