生长于微结构内点状结构的成核热力学

THE NUCLEATION THERMODYNAMICS OF DOT STRUCTURE GROWTH IN THE GROOVE STRUCTURE

研究了汽相沉积过程中的衬底表面凹结构的成核热力学，指出可以通过衬底表面微结构设计来控制成核过程以实现点状结构的生长．计算了凹结构内的临界核形成能，表明与平面相比成核优先在凹结构发生．考虑凹结构的“等效势阱”效应，发现凹结构内稳定原子团的生长速率远远大于平面处稳定原子团的生长速率．

The nucleation thermodynamics of dot structure in the groove structure of substrate surface by vapor deposition has been studied.A growth model of dot structure by controlling the nucleation taking place in the designed microscopic structure was suggested.The Gibbs free energy of the critical nuclei formation in the groove structure was calculated,and found that the groove structure can effectively promote the nucleation.Finally,considering the groove structure trapping effect,we deduced that the growth rate of the stable atomic cluster in the groove structure is larger than that of the atomic cluster on a flat surface. PACC: 6865; 6116