摘要
原子力显微镜靶丸４π旋转装置，可以将靶丸在夹持状态下实现４π方向旋转，便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量，测量结果表明，靶丸外表面粗糙度小于１０ｎｍ，内表面粗糙度小于２０ｎｍ。
In order to measure precisely the roughness of capsule surface, a 4 π turning device matching with AFM for microsphere is developed.The shell mounted on the 4 π turning device can be rotated in any angle, and anywhere of the target surface can be measured. With this equipment,various capsules are investigated and discussed.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
1999年第3期321-324,共4页
High Power Laser and Particle Beams
基金
国家863惯性约束聚变领域资助课题
关键词
原子力显微镜
靶丸
4π旋转
ICF靶
参数测量
AFM
4 π turning device of ICF microsphere
parameters measurement of ICF target
