摘要
针对大功率半导体激光器阵列难以进行光场分布测试评价的问题,设计了大功率激光器光场分布测试系统。从测试系统探测器的抗损伤阈值方面,分析了对激光衰减的比例要求,提出了几种衰减的方法,设计了低透射系数高抗激光损伤的衰减方案,并进行逐一的测试比较,得到了理想的衰减效果。结合测试系统要求,完成了大功率半导体激光器光场分布的测试与评价。
The test of optical field distribution for high-power semiconductor laser array is difficult. A test system for high-power laser optical field distribution was designed. From the anti-damage threshold of the test system detector, the laser attenuation ratio requirement was analysised ; the several attenuation method was proposed; a program which has the low transmission coefficient and the high resistance to laser damage was designed; And the test was compared one by one to get the ideal attenuation at last. For the test system requirements, the test and evaluation of high-power semiconductor laser optical field distribution was completed.
出处
《半导体技术》
CAS
CSCD
北大核心
2011年第4期265-268,共4页
Semiconductor Technology
