摘要
研制出基于长程轮廓测量仪原理的Wolter I型反射镜面形检测装置。为提高该装置测量精度,重点介绍在原有装置基础上所做的扫描光学系统结构和探测器件两方面的改进。利用五角棱镜的光学特性消除导轨运动误差;用位置敏感探测器替代CCD探测器,提高面形检测装置的理论测量分辨率。对改进后新面形检测装置进行定标和样品实测实验,并与原实验数据进行比较。结果表明:新面形检测装置倾斜度测量均方根误差为1.7μrad,轮廓高度测量误差峰谷(PV)值为56nm,测量精度明显提高。为下一步精细加工Wolter I型反射镜面形奠定了基础。
A surface profile measuring device,based on the principle of long trace profiler,is designed and established to measure the surface profile of Wolter type-I mirror.In order to obtain higher surface profile measuring accuracy,two particular improvements are made to the surface profile measuring device.The nonlinear error and the motion error of the translation slide can be eliminated by using a penta prism,which possesses an optical property all its own.The ideal measuring accuracy of the surface profile measuring device is improved by using position sensitive detector instead of CCD detector.The calibration and sample measurement experiments are done and the experimental data are compared with the old data.The result shows that the new measuring device can achieve an accuracy of 1.7 μrad for slope root-mean-square error and 56 nm for peak to valley height error.Its measuring accuracy has been significantly improved.This can meet further requirements of precision fabrication for Wolter type-I mirror.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第4期132-137,共6页
Acta Optica Sinica
基金
国家自然科学基金(10878004)资助课题
