基于灵敏度控制的光学薄膜膜系主动设计方法

Active Design of Multilayer Optical Coatings Based on Sensitivity Control

基于斜入射薄膜制备实践中镀膜误差对光谱性能的严重退化影响的认识,提出了一种基于灵敏度控制的主动膜系设计方法,深入分析了镀膜中膜层结构参数误差的分布规律,建立了膜系灵敏度的定量计算模型,并在大角度高精度消偏振增透膜的设计实验中验证了灵敏度控制思想在膜系设计中的可行性和有效性。结果表明,这一设计方法不会显著增加程序时间消耗,能获得具有良好可镀制性能的薄膜,可以避免昂贵的失败试镀和采样,缩短新薄膜的生产周期,对于高精度斜入射薄膜的重复性制备具有显著意义。

Deposition errors of oblique incidence optical coatings have a serious degradation influence on their spectral characteristics according to practical preparation experiences. An active multilayer optical coating design method based on sensitivity control is put forward to minimize the above influence. The distribution law of deposited layersr errors of structural parameters is thoroughly analyzed. Calculation model of multilayer optical coatingr s sensitivity is analytically established. Numerical design experiments in large incident angle non-polarization antireflection coatings are operated to explore and verify the feasibility and effectiveness of sensitivity control thought in films design. And numerical results show that this optical coating design method can obtain films with good manufacture feasibility without extending much program time consumption. Additionally, this design technique can make the planning of manufacture process possible without expensive sampling and make a shortening production cycle for new coating systems. It is of obvious significance for repetitive production of high quality oblique incidence optical coatings.