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三电极平面电容传感器对材料损伤的探测 被引量:5

Three-electrode planar capacitive sensor for material's damage detection
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摘要 通过ANSYS软件分析非金属材料厚度和介电常数分布不均匀对电容量的影响以及三电极平面电容传感器探头水平方向的有效探测范围。针对非金属材料表面下的异常或者损伤的检测,提出了一种结构简单、操作方便的三电极平面电容传感器检测法,并对非金属材料表面下的异常或者损伤进行探测定位。通过对损伤区的分析得出了一定传感器探头尺寸水平方向的有效探测范围为偏移损伤边缘50 mm。 The effect of non-metallic material's thickness and inhomogeneous distribution of relative permittivity to capacitance,and the effective detection range of three-electrode planar capacitive sensor in horizontal direction are analyzed.A new method of three-electrode planar capacitive sensor which is simple in construction and easy to operate is proposed to detect and locate the subsurface anomalies or damage of non-metallic materials.The effective detection range of sensor probe whose size is defined in horizontal direction is the distance of 50mm between probe's center and damage's edge by analyzing damage zone.
出处 《传感器与微系统》 CSCD 北大核心 2011年第4期57-59,62,共4页 Transducer and Microsystem Technologies
基金 国家自然科学基金资助项目(60871024)
关键词 三电极平面电容传感器 ANSYS 探测定位 材料损伤 three-electrode planar capacitive sensor ANSYS detection and location material's damage
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