适用于微传感器的纳米多孔铝膜的制备研究

Study on the Preparation of Nanoporous Anodic Alumina Membrane for Microsensor

在单晶硅表面溅射铝,采用两步阳极氧化法制备纳米多孔铝膜。研究了电解液种类、阳极氧化时间、扩孔时间对孔的结构与形貌的影响。结果表明,与硫酸和磷酸相比,草酸是制备纳米孔阵列的相对方便与可靠的电解液;第二步阳极氧化时间对孔的均匀性及孔深度影响较大,对平均孔径的影响较小;扩孔时间的长短对孔径大小及孔的均匀性均影响显著。

By sputtering alumina on the surface of silicon which was anodic alumina oxide（AAO） films were prepared by two-step anodic oxidation technology.The effect of electrolyte,anodic oxidation time and expanding time on the pore structure were studied.The results indicate that（1） compared with sulfuric and phosphoric acid,the oxalic acid is a convenient and dependable electrolyte for preparing nanoporous anodic alumina;（2）The second anodic oxidation time has a bigger influence on the uniformity and depth of the pores,and a smaller influence on the pore diameter.（3） The effect of expanding time on average pore size and uniformity is notable.