摘要
在单晶硅表面溅射铝,采用两步阳极氧化法制备纳米多孔铝膜。研究了电解液种类、阳极氧化时间、扩孔时间对孔的结构与形貌的影响。结果表明,与硫酸和磷酸相比,草酸是制备纳米孔阵列的相对方便与可靠的电解液;第二步阳极氧化时间对孔的均匀性及孔深度影响较大,对平均孔径的影响较小;扩孔时间的长短对孔径大小及孔的均匀性均影响显著。
By sputtering alumina on the surface of silicon which was anodic alumina oxide(AAO) films were prepared by two-step anodic oxidation technology.The effect of electrolyte,anodic oxidation time and expanding time on the pore structure were studied.The results indicate that(1) compared with sulfuric and phosphoric acid,the oxalic acid is a convenient and dependable electrolyte for preparing nanoporous anodic alumina;(2)The second anodic oxidation time has a bigger influence on the uniformity and depth of the pores,and a smaller influence on the pore diameter.(3) The effect of expanding time on average pore size and uniformity is notable.
出处
《上海应用技术学院学报(自然科学版)》
2010年第4期251-254,共4页
Journal of Shanghai Institute of Technology: Natural Science
基金
上海应用技术学院基金资助项目(KJ2009-08)
关键词
纳米氧化多孔铝膜
阳极氧化
平均孔径
孔均匀性
nanoporous anodic alumina membrane
anodic oxidation
average pore size
pore uniformity