衍射法高精度线径测量中偏振效应的研究

Study on Polarization Effect in High Accuracy Diameter Measurements by Diffraction Method

本文主要研究光的偏振性对线任高精度测量的影响，线径包括金属狭缝、金属窄条和金属细丝．文中给出了测量实验结果，通过电磁场矢量衍射分析，进行了理论计算，理论计算与实验结果符合得较好．

In this paper, we study the polarization effect on high accuracy measurements of metal slit filament and thin wire. We report the experimental results and calculate the results based on electromagnetic field diffraction, the theoretical results agree well with experiments.