摘要
用激光化学气相沉积法制备出平均粒径为１０ｎｍ 左右的ａＳｉ３Ｎ４ 纳米粒子．红外吸收和喇曼光谱研究表明ａＳｉ３Ｎ４ 纳米粒子中存在Ｓｉ—Ｎ，Ｓｉ—Ｈ，Ｎ—Ｈ，Ｓｉ—Ｏ—Ｓｉ键，分析了ａＳｉ３Ｎ４纳米粒子在不同的温度和气氛退火后的变化情况．并对ａＳｉ３Ｎ４ 纳米粒子胶体溶液的紫外可见吸收进行了测试分析．
In this paper we obtained nanometer sized a\|Si\-3N\-4 particles by laser induced chemical vapor deposition(LICVD). The average diameter of the particles is about 10nm.The studies of IR and Raman spectra show that there are Si_N,Si_H,N_H,Si_O_Si bonds in the particles.An analysis of Raman spectra of a\|Si\-3N\-4 for thermal treatment in various temperature and atmosphere is made.Experiments on ultraviolet\|visible absorption of a\|Si\-3N\-4 colliod are studied.
