摘要
以钛酸丁酯和无水乙醇分别为原料和溶剂，添加适量稳定剂制成稳定溶胶，用浸涂法在Ａｌ２Ｏ３ 基片上制备ＴｉＯ２ 薄膜，经１０００℃Ｈ２ 气氛下还原制得ＴｉＯ２－ ｘ薄膜．最后在氯铂酸甲醛溶液中浸泡得到掺铂薄膜．实验结果表明掺铂薄膜在８００℃下具有良好的氧敏感性和重复性，薄膜在Ｎ２ 气氛下具有良好的电阻温度特性．本文分析了铂在薄膜中的作用原理．
The TiO\-2 films on Al\-2O\-3 substrates have been prepared by dip\|coating method.The tetrabutyl titanate and absolute ethanol was used as raw material and solvent,respectively.Some stabillizing agents are added in solution to obtain stable sols.The TiO 2-x films are gained by reducing TiO\-2 films in H\-2 atmosphere at 1000℃.Then the Pt\|doped TiO 2-x films are made of immersing the TiO 2-x films in H\-2PtCl\-6\|HCHO solution for some hours.The experiment results show that Pt\|doped TiO 2-x films have good oxygen sensitivity and reproducibility of oxidizing\|reducing atmosphere at 800℃ and excellent resistance\|temperature stability in N\-2 atmosphere.The roles of Pt in the film are also discussed.
基金
天津自然科学基金
国家"863"高技术计划新材料领域基金
