高温半导体材料碳化硅及其在微机电中的应用
被引量：1
摘要
简要介绍碳化硅的性质、制备、加工技术和它在恶劣环境下的微机电系统中的应用。
同被引文献39
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二级引证文献2
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1程洁,孟延,苗钦华,范磊,葛世荣.电子制造摩擦学[J].摩擦学学报,2023,43(8):833-854.
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2刘伟,胡利方,郑植,高伟,丑昭,成晓,王勇.玻璃与碳化硅阳极键合机理及其力学性能研究[J].机械工程学报,2024,60(16):151-159.
