热熔回流工艺参数对微球形结构高度影响的仿真研究

Simulation Research on Effect of Thermal Reflow Processing Parameters on Height of Micro-spherical Structure

应用Marc软件仿真光刻胶熔融变形过程,研究热熔回流工艺参数对尺寸规格D×h为Φ500μm×66μm的微圆柱光刻胶熔融后微球形结构高度的影响.对仿真结果进行正交实验法分析,得出最佳工艺参数组合;对仿真结果进行单因素实验法分析,研究不同工艺参数对微球形结构高度的影响规律.结果表明,最佳工艺参数组合:加热速率1℃/s,加热温度110℃,保温时间45 min;工艺参数对微球形结构高度的影响顺序为:保温时间>加热速率>加热温度.

In order to research the influence of thermal reflow processing parameters on the micro-spherical structure＇s height which is melted by the D×h（Φ500 μm×66 μm） micro-cylinder resist,the Marc software was applied to simulate resist melting and deforming processing.The ideal processing parameters combination was obtained by orthogonal experimental method and the single factor experimental method was utilized to study the effect law of different processing parameters on the height of micro-spherical structure.The results showed that the ideal processing parameters combination was 1 ℃/s for heating rate,110℃ for heating temperature and 45min for holding time;the significance of processing parameters on the micro-spherical structure＇s height can be ordered in holding timeheating rateheating temperature.