深亚微米半导体器件模拟方法的分析与设计

Analysis and Design for Deep Submicron Semiconductor Device Simulation

对半导体器件模拟软件系统的构造进行了全面系统的分析，对所涉及到的关键问题进行了深入讨论。研究了适合于深亚微米半导体器件的流体动力学模型的物理实质、相互关系和选取原则，总结了非线性偏微分方程组系统的离散技术，提出了可行的迭代求解算法与方法，完成了面向对象的模拟软件结构分析与系统设计，初步探讨了基于ＣＯＲＢＡ

The configurations of modern semiconductor device simulation system with the major key factors that concerned are fully analyzed and discussed in this paper. The physical essence, relationships and applications of the different Hydrodynamic Transportation Models are presented, and the discretization schemes for nonlinear partial differential equations as well as the possible iteration methods for the larger sparse matrix equation are proposed. Finally, the systematic analysis and design of the object oriented simulation software are achieved, and the implementation procedure and the validity of parallel calculation under the CORBA platform are further considered.