非硅MEMS惯性开关弹道特性

The Ballistic Characteristics of Non-silicon MEMS Inertia Switch

针对国内缺乏对MEMS惯性开关弹道特性仿真研究这一问题,利用ANSYS软件对一种新型非硅MEMS惯性开关进行仿真研究,获得这种惯性开关弹道特性的仿真结果。结果验证了这种新型的非硅MEMS惯性开关具有高可靠性、更灵敏的碰目标响应,可进一步研究其实用价值。

For the problem that the domestic lack of ballistic characteristics simulation research of the MEMS inertial switch,the simulation of the ballistic characteristics of a new kind of non-silicon MEMS inertia are made with ANSYS software,the ballistic characteristics simulation results of this kind inertial switch are gotten.The results prove that this new kind of non-silicon MEMS inertia switch has high reliability,response of touch target sensitively,can study its useful value further.