基于灵敏度分析的微机械陀螺稳健优化设计

Robust design of microgyroscope based on sensitivity analysis and worst-case tolerance

提出了基于灵敏度分析的微机械陀螺稳健优化模型,开发了相应的稳健设计流程。以往的研究是将设计变量中的不确定量考虑为统计容差,与之不同的是,该设计采用最坏情况容差分析,优化算法使用遗传算法,采用键合-离子反应深刻蚀加工器件。灵敏度分析结果表明稳健设计结果对误差是不敏感的。同时进行了蒙特卡洛分析,结果表明有88.35%的样本是可接受的。

This paper presents a robust optimal model of Micro Electro Mechanical Systems（MEMS） gyroscope and its design procedure.The proposed method adopts the sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties.The genetic algorithm with the advantage of global optimization is employed.Sensitivity analysis shows the robust design is less sensitive to errors.Monte Carlo analysis is also performed,whose result indicates 88.35% of samples are acceptable.The gyroscope is fabricated using bonding and deep etching bulk micromachining process.