复合样品厚度参数同步辐射测量方法

Thickness measurement of complex sample with synchronous radiation

薄膜样品在实验研究领域要求样品的厚度测量精度非常高,但由于样品质量小,采用称重的方法,测量精度较差。在北京同步辐射装置的中能（4B7A）和低能（4B7B）束线上（光源能区为0.1~6.0 keV,能量分辨大于1 000）,采用材料对单能光子的透过率来确定样品的质量厚度,通过不同能点的测量值进行不确定度分析,提高测量精度,降低不确定度。利用该方法开展了复合样品厚度的测量方法研究,给出了有CH衬底的薄膜样品的厚度,通过不确定度分析得出,薄膜样品厚度的测量不确定度小于1%。

Film samples,especially the complex sample,require thickness measurement in very high precision,which can not be achieved by weighing method due to the samples＇ small mass.The beamlines of median energy（4B7A） and low energy（4B7B） in Beijing Synchronous Radiation Facility have energies of 0.1 keV to 6.0 keV and energy resolution of over 1 000.This paper presents a thickness measurement method for complex samples by measuring single-energy photon filtering from the samples with the two beamlines,and analyzes the measurement uncertainty at different energy points to improve the measurement precision.The thickness obtained for a complex sample with CH substrate has a measurement uncertainty of less than 1%.