摘要
采用溶胶-凝胶法结合匀胶旋涂工艺在复合基片(Pt/Ti/SiO2/Si)上制备了钴铁氧体(CoFe2O4)薄膜,利用XRD、SEM、VSM分析了薄膜的微结构以及磁性能,研究了不同退火温度对钴铁氧体薄膜的结构和磁性能的影响。结果表明,钴铁氧体在500℃时开始形成尖晶石相。随着退火温度的增高,钴铁氧体晶粒逐渐长大,饱和磁化强度和矫顽力逐渐增强,到600℃时,尖晶石相已经非常明显,晶粒尺寸大小均一,饱和磁化强度和矫顽力分别为427.48 emu.cm-3和1224.11 Oe,当退火温度提高到700℃时,晶粒进一步长大,但是薄膜中出现反铁磁相α-Fe2O3,而且薄膜表面出现了气孔和晶粒大小不均匀等缺陷,导致饱和磁化强度和矫顽力下降。
Co-ferrite thin films have been synthesized on Pt/Ti/SiO2/Si substrates by the sol-gel spin-coating technique annealed at temperatures ranging from 400 to 700 ℃ in air.The structure and magnetic properties were analyzed by X-ray diffraction,scanning electron microscopy and vibrating sample magnetometer.Impact of different annealing temperature on microstructure and magnetic properties of Co-ferrite thin films was also dealt with.The results show that spinel phase begins to form at 500 ℃,and the grain size,saturation magnetization and coercivity increase gradually with the increase of annealing temperature.When annealing temperature is 600 ℃,the spinel phase exists,the distribution of grain particle sizes is uniform,saturation magnetization and coercivity are 427.48 emu·cm-3 and 1224.11 Oe,respectively.When the annealing temperature is 700 ℃,the grain grew further,but the anti-ferromagnetic α-Fe2O3 exists and cracks appear,which leads to the decrease of saturation magnetization and coercivity.
出处
《金属功能材料》
CAS
2011年第2期37-41,共5页
Metallic Functional Materials
基金
教育部高等学校博士学科点专项科研基金新教师项目(200803591037)
合肥工业大学博士学位专项基金(GD-BJ2008-008)
合肥工业大学2009年科技创新群体项目
合肥工业大学2010年大学生创新性实验计划项目(cxsy102096)
关键词
CoFe2O4薄膜
退火温度
微结构
磁性
CoFe2O4 thin films
annealing temperature
microstructure
magnetic properties