计算全息光栅扫描器与制作工艺的研究

Study of Computer generated Hologram Grating Scanner and fabricating technique

简述了计算全息光栅扫描器的特点和优点， 以及它有可能成为解决ＣＯ２ 激光成像雷达的激光扫描这一关键技术的有效途径， 并给出当蚀刻深度为λ／４ ＝ ２－６５ μｍ 时， 传统的加工工艺受到的障碍及给出新的加工工艺和明显的实验效果。最后给出要想使计算全息光栅扫描器成为真正满足ＣＯ２激光成像雷达扫描技术的实用型光栅扫描器，

In this paper, characteristics and merits of the computer generated hologram grating scanner are introduced simply and it may become a available way to solve the scanning technique of CO 2 laser imaging radar which is one of the key technique. Secondly, when the depth of ruling is 2 65 μm, traditional fabricating technique meets stumbling block, a novel technique is presented and clear experimental results are given. At last, the developing trend of theory and fabrication are given to make it become realistic and useful computer-generated hologram grating scanner which can use in CO 2 laser imaging radar.