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用改造后的柯氏干涉仪测量量块中心长度的测量不确定度评定 被引量:6

Uncertainty Evaluation of the Measurement of Gauge Block by Using an Improved Koester Interferometer
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摘要 通过用633nm 短频He-Ne 激光代替氪灯,提高小数测量的准确度等措施,对常规柯氏干涉仪进行了改造,结果获得测量量块中心长度的标准不确定度为uc= (5.5nm )2+ (8.3×10- 8L)2。 By the improvements such as using a stabilized He\|Ne laser instead of Kr lamp,increasing the measurement uncertainty of the fraction order,etc.,the standard unceratinty of the measurement of the length of gauge block by using a Koester interferometer was obtained.It is much more better than the maximum permissible uncertainty of the 1st order gauge block.
出处 《现代计量测试》 1999年第6期7-16,共10页 Modern Measurement and Test
关键词 柯氏干涉仪 测量不确定度 量块中心长度 gauge block Koester interferometer measurement unceratinty
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