摘要
通过用633nm 短频He-Ne 激光代替氪灯,提高小数测量的准确度等措施,对常规柯氏干涉仪进行了改造,结果获得测量量块中心长度的标准不确定度为uc= (5.5nm )2+ (8.3×10- 8L)2。
By the improvements such as using a stabilized He\|Ne laser instead of Kr lamp,increasing the measurement uncertainty of the fraction order,etc.,the standard unceratinty of the measurement of the length of gauge block by using a Koester interferometer was obtained.It is much more better than the maximum permissible uncertainty of the 1st order gauge block.
出处
《现代计量测试》
1999年第6期7-16,共10页
Modern Measurement and Test