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PET柔性衬底上生长绒面ZnO-TCO薄膜及其在薄膜太阳电池中的应用 被引量：12

Surface textured ZnO-TCO thin films grown on PET flexible substrates and the applications in thin-film solar cells
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摘要 利用低压金属有机化学气相沉积(LP-MOCVD)技术在PET柔性衬底上低温生长绒面结构ZnO-TCO薄膜,DEZn和H2O作为源材料,B2H6作为掺杂剂。详细研究了薄膜掺杂流量对ZnO薄膜微观结构以及光电性能影响。优化获得的PET/ZnO:B薄膜厚约为1500 nm时,绒面结构PET/ZnO薄膜的方块电阻约为10Ω,可见光及近红外范围平均透过率达80%。初步应用于a-Si薄膜电池,电池结构为PET/ZnO-TCO/pin-a-Si/Al,电池的转换效率可达6.3%。 The low-pressure metal organic chemical vaper deposition（LP-MOCVD） technique is used to grow textured ZnO-TCO thin films on PET substrates at low temperature.The effects of the B-doping on the microstructure,electrical and optical properties of the ZnO thin films are investivated.Typical PET/ZnO：B films are with thickness of 1 500 nm,sheet resistanceof Rs～10Ω,and average transmittance in the visible and near infrared region of Ta～80%.The textured ZnO-TCO thin films are used in a-Si thin film solar cells and an efficiency of 6.3% is abtained（solar cell structure：PET/ZnO-TCO/pin-a-Si/Al）.
作者 林泉 陈新亮 倪牮 张德坤 孙建 赵颖 耿新华
机构地区 南开大学光电子薄膜器件与技术研究所
出处 《光电子．激光》 EI CAS CSCD 北大核心 2011年第5期714-717,共4页 Journal of Optoelectronics·Laser
基金 国家重点基础研究发展计划资助项目(2011CB201605,2011CB201606&2011CB201607) 天津市应用基础及前沿技术研究计划资助项目(09JCYBJC06900) 中央高校基本科研业务费专项资金项目(65010341)
关键词 金属有机化学气相沉积(MOCVD) PET柔性衬底 ZnO-TCO薄膜 薄膜太阳电池 metal organic chemical vapor deposition（MOCVD） PET flexible substrates ZnO-TCO thin films thin-film solar cells
分类号 O484 [理学—固体物理]
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参考文献16

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二级参考文献30

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光电子．激光
2011年 第5期

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