摘要
分析了静电驱动原理以及失效原因,针对静电驱动的特点设计了用于静电驱动的控制电源,该电源采用内嵌DAC的ADuC842系统作为控制芯片,与信号采集及反馈电路一同构成闭环控制系统,控制DC-DC变换器产生大范围的稳定电压。输出电压范围15~80V,电压文波〈800mV。
In this paper,a source is designed for electrostatic actuator based on the analysis of electrostatic comb-drive.A controlling IC ADuC842 with DAC inside and signal acquisition circuit constitute a close-loop control system which control the DC-DC converter to generate a big range of voltage.The output voltage range is 15~80 V,and the voltage ripple is less than 800 mV.
出处
《光机电信息》
2011年第4期39-42,共4页
OME Information
