阵列式等离子体射流特性的研究

Study on the characteristics of array plasma jet

研究了大气压下阵列式等离子体射流特性,以实现和完善大气压下大面积的低温等离子体灭菌技术.采用MAXWELL 3D软件仿真及实验的手段,研究相关因素对各种阵列式等离子体射流特性的影响.包括在单管等离子体喷射中的一些基本影响因素(电压、气体流速等)和阵列式等离子体喷射实验中所特有的一些因素(气流均匀度、电极单元间距及电极布置方式).实验在大气压氦气环境下进行,然后通过专门研发的高频高压等离子体放电电源进行了介质阻挡放电.实验结果实现了大气压下阵列式等离子体喷射,证明了通过阵列式等离子体喷射方式来实现大面积等离子体灭菌技术的可行性.除此之外还得出了各种相关因素对阵列式等离子体射流特性的具体影响,用以完善阵列式等离子体射流技术,进行更大面积的灭菌处理.

This paper investigates the characteristics of the array plasma jet,with the purpose of large area on low temperature plasma for sterilization.Simulation using MAXWELL 3D and some experiments are operated to learn the effect of some related factors to the array plasma jet.This factors include not only these factors（voltage,flow rate,etc） usually considered in the experiment of single plasma jet but also some elements（airflow uniformity,element spacing and electrode arrangement） appeared only in the condition of array plasma jet.Experiments are operated in the helium environment at atmospheric pressure,then a self-made high frequency high voltage plasma discharge power is applied for some dielectric barrier discharge experiments.As a result,array plasma jet is achieved,which means it is possible to get large area on low temperature plasma at atmospheric pressure by this manner of array plasma jet.Besides,these results also show that how these factors work in the condition of array plasma jet,which could be a promotion for the technology of array plasma jet to achieve larger area low temperature plasma for sterilization.