基于PDMS的倒脊形波导电光调制器的设计与制备

Design and Fabrication of Inverted Ridge Waveguide Electro-Optic Modulator Based on PDMS Material

选用价格低廉、介电性能良好、低传输损耗的聚二甲基硅氧烷作为波导的包层材料,旁链型分散红1键合聚甲基丙烯酸甲酯作为芯层,设计并制备了一种倒脊形聚合物波导马赫-曾德尔电光调制器及共面波导行波电极,获得了调制器的调制信号响应.针对SF6气体刻蚀聚二甲基硅氧烷的再淀积现象,提出了采用SF6和O2的混合气体对聚二甲基硅氧烷进行反应离子刻蚀的方法,发现当SF6∶O2流量比为50 sccm∶10 sccm时,刻蚀形成的凹槽侧壁陡直,底部平坦;实验制备的倒脊形马赫-曾德尔波导在1 550 nm波长下通光良好.

Polydimethylsiloxane is a kind of silicone which has merits of cost effective,good dielectric properties,and lower optical transmission loss in infrared range.Since the Poly[（methyl methacrylate）-co-（Disperse Red 1 methacrylate）] is applied as the active layer,in order to avoid the passive influence between the core and claddings,polydimethylsiloxane was chosen to be the cladding layer.An inverted ridge polymer waveguide Mach-Zehnder Electro-Optic modulator was designed and fabricated.Aiming at the deposition phenomena which arises when only using SF6 in polydimethylsiloxane reactive ion etching,a method of utilizing the mixture of SF6 and O2 was proposed for polydimethylsiloxane reactive ion etching process.It was found that when the flux ratio of SF6∶O2 is 50 sccm∶10 sccm,the groove has the best shape.Through the optical test,the fabricated inverted ridge Mach-Zehnder waveguide has a good near-infrared light output.Co-planar waveguide electrodes based on Aluminum material were designed and fabricated,and signal response of electro-optic modulator was observed.