摘要
辉光光谱仪的样品激发方式是阴极溅射,逐层分离。这个特点决定了该技术也可用于扫描电镜的样品制备中。扫描电镜可以用于观测热镀锌板镀层中的各种相,但由于某些相的厚度太薄,截面无法观测。本文利用辉光光谱仪对热镀锌板样品进行表面溅射,用扫描电镜对得到的不同厚度处的"新"表面进行了形貌观测,用能谱仪进行成分分析,达到了观测镀层中几乎所有相的目的,表明辉光放电离子溅射是一种可行的扫描电镜样品制备方法。
The sample excitation mode of glow discharge optical emission spectrometer was cathode sputtering and layer-by-layer separation.This character indicated that this technique could also be used in the sample preparation for scanning electron microscopy（SEM）.SEM could be used to observe all phases in the coating of hot-dip galvanized steel sheet.However,some phases were too thin,so the cross section could not be observed.In this study,the surface of hot-dip galvanized steel sheet sample was sputtered by glow spectrometer.Then,the morphology of ＂new＂ surface with different thicknesses was observed by SEM,and the composition was analyzed by energy disperse spectroscopy.The aim to observe all phases in the coating of hot-dip galvanized steel sheet was realized.It indicated that glow discharge ion sputtering was a feasible method of sample preparation for scanning electron microscopy.
出处
《冶金分析》
CAS
CSCD
北大核心
2011年第3期6-10,共5页
Metallurgical Analysis
关键词
辉光放电
溅射
扫描电镜
样品制备
热镀锌板
glow discharge（GD）
sputtering
scanning electron microscopy（SEM）
sample preparation
hot-dip galvanized steel sheet
