阶跃型边界平面干涉测量技术

Interferometry for Measurement of Plane with Step Boundary

为完成复杂平面样板的测量,提出了一种循环单纯形边缘特征提取及种子填充的数字图像处理技术,解决了复杂平面样板相位复原的问题;应用波长合成技术和小数重合法在相位偏移干涉系统中实现了阶跃型边界平面样板的干涉级次整数部分及小数的测量。在实验中对两种阶跃型平面样板测量的重复性达到了10nm,将其测量结果和三维纳米测量机的测量结果进行了比较,两种仪器测量数据最大偏差8 nm。分析了实验数据的可靠性以及两种测量仪器的优缺点,为复杂平面样板的测量提供了一种新的思路。

To accomplish complex plane model measurement,a cyclic simplex method of edge feature extraction and seed filling digital image processing technology are presented to solve the problem of phase recovery of a complex plane model,and by using the wavelength synthesis technique and excess fraction method in phase-stepping interference system,both the integer part and the fraction of the order of interference fringe of a plane model with step boundary are measured.A repeatability of 10nm is achieved in measurements of two kinds of step plane models.The measurement results are compared to that of a Nanoscale Coordinate Measuring Machine.The maximum difference between the data of two systems is 8nm.The reliability of experimental data as well as the advantages and disadvantages of the two measuring instruments are analyzed.This research provides a new idea for measurements of complex plane models.