摘要
光学干涉方法在材料线膨胀系数测量中有着广泛的应用,本文对用于线膨胀系数测量的各种干涉仪的工作原理和典型结构进行了分类介绍,对不同干涉系统设计形式的特点进行了分析比较,指出了为提高测量准确度在光学系统设计上应注意的问题。
Optical interferometry is applied widely in measurements of coefficients of linear thermal expansion of materials.The principles and typical systems of interferometers for measurements of coefficients of linear thermal expansion are introduced.The characteristics of various optical systems of interferometers are compared and analyzed.Issues that should be considered in optical system designs for improving measurement accuracy are pointed out.
出处
《计测技术》
2011年第2期52-55,62,共5页
Metrology & Measurement Technology
关键词
测量
线膨胀系数
干涉仪
measurement
coefficient of linear thermal expansion
interferometer