摘要
研究了用ＰＣＶＤ法所制备的ＴｉＮ，ＴｉＡ１Ｎ及ＴｉＳｉＮ硬质涂层的抗高温氧化性及ＴｉＮ涂层在双氧水介质中的抗氧化性。结果表明，ＴｉＡ１Ｎ，ＴｉＳｉＮ涂层在空气中的抗高温氧化性可达７００℃以上， ＴｉＮ涂层可达６００℃。在双氧水介质中， ＰＣＶＤ－ＴｉＮ涂层仍具有较强的抗氧化能力， 且优于ＰＶＤ－ＴｉＮ
The resistance to high temperature oxidation of TiN,TiAlN and TiSiN coatings prepared by plasma chemical vapor deposition was studied. The HSS samples with TiAlN or TiSiN coatings could be heated to 700℃ in the air and the coatings were not noticeably changed. And the samples with PCVD TiN coatings could stand 600℃ .The resistance of the TiN coatings to H 2O 2 solution was also studied. The results were that the HSS samples with PCVD TiN could not be corroded.
出处
《青岛化工学院学报（自然科学版）》
1999年第3期245-247,共3页
Journal of Qingdao Institute of Chemical Technology(Natural Science Edition)
关键词
氮化钛
涂层
高温
PVCD
沉积
金属
合金钢
plasma chemical vapor deposition
TiN,TiAlN,TiSiN coatings
resistance to oxidation
