The Effect of Unbalanced Coefficient of Magnetron on the Structure and Properties of CN_x Coatings 被引量：1

The Effect of Unbalanced Coefficient of Magnetron on the Structure and Properties of CN_x Coatings

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摘要 The effect of unbalanced coefficient of magnetron （UCM） on the structure and tribological properties of CrNx hard coatings was studied.The CrNx coatings were deposited on both Si wafer and hardened tool steel substrates using a closed-field unbalanced magnetron sputtering ion plating technique in a gas mixture of Ar＋N2 under different unbalanced magnetron conditions.The coatings were characterized by means of XRD,XPS,SEM,microhardness tester and pin-on-disc tribometer to study respectively their structure,chemical bonding state,microstructure,hardness and tribological properties.The experimental results show that the UCM has a profound effect on the structure,hardness and tribological properties of the CrNx coatings.With increasing the values of UCM,the dominant phases in the deposited coatings evolved from Cr＋Cr2N to Cr2N＋CrN,the microstructure became denser and the hardness increased;in addition,reduced coefficient of friction and improved wear resistance of CrNx coatings were also observed under a larger UCM. The effect of unbalanced coefficient of magnetron （UCM） on the structure and tribological properties of CrNx hard coatings was studied.The CrNx coatings were deposited on both Si wafer and hardened tool steel substrates using a closed-field unbalanced magnetron sputtering ion plating technique in a gas mixture of Ar＋N2 under different unbalanced magnetron conditions.The coatings were characterized by means of XRD,XPS,SEM,microhardness tester and pin-on-disc tribometer to study respectively their structure,chemical bonding state,microstructure,hardness and tribological properties.The experimental results show that the UCM has a profound effect on the structure,hardness and tribological properties of the CrNx coatings.With increasing the values of UCM,the dominant phases in the deposited coatings evolved from Cr＋Cr2N to Cr2N＋CrN,the microstructure became denser and the hardness increased;in addition,reduced coefficient of friction and improved wear resistance of CrNx coatings were also observed under a larger UCM.

作者文晓斌李显

机构地区 School of Material Science and Engineering

出处《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第2期274-280,共7页 武汉理工大学学报（材料科学英文版）

基金 Funded by the National High-technology Research and Development Programm of China(No.2005AA33H010)

关键词 magnetron sputtering unbalanced coefficient CrNx coating structure properties magnetron sputtering unbalanced coefficient CrNx coating structure properties

分类号 TG174.4 [金属学及工艺—金属表面处理]

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