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表面波等离子体暴露下铜表面的氧化特性(英文)

Study of oxidation characteristic on copper surface exposed by surface wave plasma
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摘要 Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics. Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics.
出处 《材料与冶金学报》 CAS 2011年第1期58-60,69,共4页 Journal of Materials and Metallurgy
关键词 surface wave plasma material surface reformation wetting characteristics surface wave plasma material surface reformation wetting characteristics
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参考文献2

  • 1Nonaka S. Surface waves and plasma production: excitation and propagation of surface waves ( in .japanese) [J ]. Journal of the Japan Society of Plasma Science and Nuclear Fusion Research, 1996, 72:622 -628.
  • 2Ono S. Surface tension (in japanese) [ M]. Kyouritsu Publishers, 1980: 64, 71.

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