CrN基复合薄膜的结构及摩擦磨损性能研究

The Structure and Wear Properties of High Performance CrN-based Ternary Films

采用反应磁控溅射法制备了CrN、CrSiN与CrAlN复合薄膜,分析了复合薄膜的微观结构,并考察了3类薄膜的摩擦磨损性能.结果表明:所制备的薄膜晶体结构没有随着Si或Al的加入发生转变,仍然为面心立方结构.CrAlN复合薄膜为合金复合薄膜,其中Al以置换方式固溶于CrN中,取代了一部分Cr原子,形成固溶体;CrSiN复合薄膜为晶态CrN与非晶态Si3N4组成纳米复合结构.复合薄膜结构致密且硬度较CrN大幅提高,在摩擦磨损过程中具有较强的抗形变能力,能够有效阻止裂纹,抗摩擦磨损性能较CrN薄膜均有不同程度的提高.

The CrN,CrAlN and CrSiN films were deposited using medium frequency magnetron sputtering.The microstructure and the wear properties of the films were investigated.It was found that the XRD peaks of the CrAlN and CrSiN films were similar to that of the CrN coatings and could be well indexed using the cubic NaCl-type structure.The crystallography structure of only single-phase fcc CrAlN solid solution,without other separated phase structure was detected.While the CrSiN films had a nanocomposite structure consisting of nano-crystalline CrN in amorphous Si3N4 matrix.The CrAlN and CrSiN film had much smaller grain size and denser structure compared with CrN films.The as-deposited ternary films also showed higher hardness than the CrN film deposited under similar conditions.The ternary films synthesized at this experimental conditions had excellent wear resistance property than that of the CrN film and this enhancement could be attributed to the small grain size,compacted or/ nanocomposite structure,high hardness and formation of distortion in wear process avoiding the fracture of the films.